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Nano/Micro System Engineering

A micromachine accomplishes a dream to realize machines that manipulate information with light, diagnose the body from the inside, or assembles parts by operating individual atoms and molecules.

We are aiming at the realization of microsystems and nanosystems with novel and unique functions by integrating functional elements in different domains such as mechanics, electronics, chemistry, optics and biotechnology. These micro/nano systems are expected to be novel machines which will support a highly-networked information society, an aging society and an eco-friendly society in the 21st century.

Research on a three dimension micro fabrication and micro/nano assembling technology for construction of micro/nano systems, evaluation of mechanical properties of thin films, micro sensors, micro-actuators, etc., is pursued.

The introduction to this laboratory's research can be also found in  "Introduction to research for prospective students" page in the homepage of the Undergraduate Course Program of Mechanical and System Engineering.

Academic Staff

* Add ".kyoto-u.ac.jp" to each E-mail address.

Osamu TABATA

Osamu TABATAProfessor (Graduate School of Engineering)

Researches

The target of my research is the establishment of a technology to realize a unique and novel nanosystem by assembling the various functional components such as a microchip, a particle, a microcapsule, a cell, etc., with sizes ranging from the nanometer to micrometer scale on a few mm square MEMS substrate. This technology is termed SENS (synthetic engineering for nanosystems), and experimental and theoretical research on the establishment of SENS is pursued.

Contacts

Room c2S13, Building C3, Katsura Campus
TEL: +81-75-383-3690
E-mail: tabata@mech

Toshiyuki TSUCHIYA

Toshiyuki TSUCHIYAAssociate Professor (Graduate School of Engineering)

Researches

In order to establish the microsystem engineering, wide range of the research such as design, fabrication, and evaluation for MEMS and NEMS devices are being conducted. My research, being based on surface micromachining and its sensor application, is currently focusing on the development of the mechanical property database and the measurement of the fatigue properties for the micro and nano materials.

Contacts

Room c2S14, Building C3, Katsura Campus
TEL: +81-75-383-3691
E-mail: tutti@mech

Koichi NAKAMURA

Associate Professor (Graduate School of Engineering)

Researches

N/A

Contacts

N/A

Yoshikazu HIRAI

Yoshikazu HIRAIAssistant Professor (Graduate School of Engineering)

Researches

N/A

Contacts

Room c2N05, Building C3, Katsura Campus
TEL: +81-75-383-3693/3738
E-mail: hirai@me

Research Topics

Micro/Nano Fabrication Technology

We are conducting research and development on the three dimensional (3-D) micro processing technology for realizing micromachines, MEMS, and microsystems.

A moving mask X-ray exposure technology invented recently by our laboratory is a 3-D processing technology of polymers based on a synchrotron radiated X-rays with wavelengths in the range of several angstroms.  Figure 1 shows the principle and examples of processed structures.

In addition, research and development on a silicon isotropic etching technology using Xenon di-fluoride gas, and the anisotropic etching of single crystalline silicon using a strong alkaline solution, are being conducted.  3-D micro fabrication process simulation technology is also being addressed.

In the future, we will aim at the establishment of a synthetic engineering for nano systems (SENS).  SENS is the technology of assembling functional components at the micro meter to nano meter scale to build a nano system at the chip level created with MEMS technology.  It is a new way to merge a top-down approach with a bottom-up approach.

Concept and application of the three dimensional fabrication technology by synchrotron radiated X-ray

Figure 1 Concept and application of the three dimensional fabrication technology by synchrotron radiated X-ray.

Evaluation and Analysis of Thin Film Mechanial Properties

A micromachine, a MEMS and a microsystem utilizes thin films with thicknesses of a several microns down to the submicron scale as structural materials. Although thin film materials have often been utilized as functional materials so far, they have not often been utilized as structural materials. Therefore, only very little data about the mechanical properties, such as Young's modulus, the fracture strength and fatigue life required for MEMS design, are available.
Furthermore, in decreasing material component size, it is possible that those factors that dominate material strength and fatigue at the microscopic scale differ from those at the conventional macro scale level.

Therefore, our laboratory is conducting the evaluation of mechanical properties of various thin films for MEMS using a unique fatigue testing method invented by us and shown in Fig. 2. Our goal is the establishment of a design criterium for MEMS with constructing a thin film mechanical properties database.  

Development of fatigue testing apparatus for MEMS and establishment of database of mechanical properties

Figure 2 Development of fatigue testing apparatus for MEMS and establishment of database of mechanical properties.

Creation of Micro/Nano System

A micromachine, a MEMS and a microsystem accomplish novel and unique functions by integrating different domains such as mechanics, electronics, chemistry, optics and biotechnology at the scale of micro meter to nano meter.

Our Laboratory is conducting research on the realization of micro/nano systems with full use of the standard MEMS fabrication technology and newly our proposed 3-D micro processing technology. By way of example, a DNA sequencing plastic micro chip, developed by us, is shown in Fig. 3. It is coming into practical use in the near future.

In the future, we will focus on SENS (Synthetic Engineering for Nano System) technology to realilze a micro/nano system using an assembling technology for functional components at the micro to nano meter scale.

Concept of microchip for analyzing DNA base arrangement

Figure 3 Concept of microchip for analyzing DNA base arrangement