CR_EquipList

Yellow Room

Equipment

Manufacturer

Model

Person in charge

Double Side Aligner Union PEM-800 Ryuji Yokokawa
Single Side Aligner Nanotec LA310S Hirofumi Shintaku
Laser Exposure Heidelberg uPG101 Ryuji Yokokawa
Microscope Mitsutoyo MF-UB1010C Ryuji Yokokawa
Moving Mask Aligner Japan Science Eng. MUM-0001 Yoshikazu Hirai
Stepper Japan Science Eng. KS-7000 Yoshikazu Hirai
Wafer Anodic Bonder Horivac 300S Toshiyuki Tsuchiya

Clean Room

Equipment

Manufacturer

Model

Person in charge

Desktop SEM Hitachi TM-3000 Hirofumi Shintaku
Electron Beam Writer Tokyo Tech L-5000 Hirofumi Shintaku
RIE Samco 10NR Hirofumi Shintaku
Sputtering System Sanyu SVC-700RFI Hirofumi Shintaku
Thermal Deposition ULVAC VPC-260F Ryuji Yokokawa
Nanoimprint Maruni TP-32937 Ryuji Yokokawa
ICP-RIE ULVAC NE-730 Toshiyuki Tsuchiya
Compact Etcher Samco FA-1 Toshiyuki Tsuchiya
Nanoimprint Bondtech NI-1000K Toshiyuki Tsuchiya
EB Deposition Yashima Toshiyuki Tsuchiya
Wafer Bonder Bondtech WAP-100 Yoshikazu Hirai
IR micrscope Moritex Irise Yoshikazu Hirai

Chemical Reagent Room

Equipment

Manufacturer

Model

Person in charge

Parylene Coater Labcoter PDS2010 Hirofumi Shintaku
Surface Profilometer Veeco Dektak XT-S Hirofumi Shintaku
Dicing Machine Disco DAD-322 Toshiyuki Tsuchiya
Wedge Bonder Ultrasonic Eng. SW-1-7K Toshiyuki Tsuchiya
Ball Bonder Kulicke & Soffa Model 4524 Hirofumi Shintaku
CO2 Supercritical drying Quorum Tech. K850 Toshiyuki Tsuchiya