CR_EquipList
Yellow Room
|
Equipment |
Manufacturer |
Model |
Person in charge |
|---|---|---|---|
| Double Side Aligner | Union | PEM-800 | Ryuji Yokokawa |
| Single Side Aligner | Nanotec | LA310S | Ryuji Yokokawa |
| Laser Exposure | Heidelberg | uPG101 | Ryuji Yokokawa |
| Microscope | Mitsutoyo | MF-UB1010C | Ryuji Yokokawa |
| Moving Mask Aligner | Japan Science Eng. | MUM-0001 | Yoshikazu Hirai |
| Wafer Anodic Bonder | Horivac | 300S | Toshiyuki Tsuchiya |
Clean Room
|
Equipment |
Manufacturer |
Model |
Person in charge |
|---|---|---|---|
| Desktop SEM | Hitachi | TM-3000 | Ryuji Yokokawa |
| Thermal Deposition | ULVAC | VPC-260F | Ryuji Yokokawa |
| Nanoimprint | Maruni | TP-32937 | Ryuji Yokokawa |
| ICP-RIE | ULVAC | NE-730 | Toshiyuki Tsuchiya |
| Compact Etcher | Samco | FA-1 | Toshiyuki Tsuchiya |
| Nanoimprint | Bondtech | NI-1000K | Toshiyuki Tsuchiya |
| EB Deposition | Yashima | Toshiyuki Tsuchiya | |
| Thermal Deposition | ULVAC | VPC-260F | Toshiyuki Tsuchiya |
| Wafer Bonder | Bondtech | WAP-100 | Yoshikazu Hirai |
| IR micrscope | Moritex | Irise | Yoshikazu Hirai |
Chemical Reagent Room
|
Equipment |
Manufacturer |
Model |
Person in charge |
|---|---|---|---|
| Parylene Coater | Labcoter | PDS2010 | Keiko Kawano |
| Surface Profilometer | Veeco | Dektak XT-S | Ryuji Yokokawa |
| Dicing Machine | Disco | DAD-322 | Toshiyuki Tsuchiya |
| Wedge Bonder | Ultrasonic Eng. | SW-1-7K | Toshiyuki Tsuchiya |
| Wire Bonder | Shinkawa | UTC-5000 | Yoshikazu Hirai |
| CO2 Supercritical drying | Quorum Tech. | K850 | Toshiyuki Tsuchiya |