Nano/Micro System Engineering

MEMS explores nano universes

Our research focuses on nano- and micro-scale machines, called as nano- and micro-system, manufactured by semiconductor microfabrication technology. In this area, it is necessary to handle phenomena that are neglected in macroscopic machines due to size effects, such as electrostatic field, gas viscosity, and quantum effect. So, we need to understand mechanical engineering from a new perspective. We aim to create new miniature machines that will be used in society in the future, making full use of the latest processing technology, measurement/evaluation technology, and design/analysis technology.

Academic Staff

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Toshiyuki TSUCHIYA

Toshiyuki TSUCHIYAProfessor (Graduate School of Engineering)

Research Interests

1. Three-dimensional nano/micro fabrication and assembly technologies for nano/micro systems
2. Mechanical reliability evaluation of nano/micro materials, devices and systems
3. Micro sensors and actuators of high-performance, multi-function and high-reliability
4. Measurement and control of energy carrier transport across nanogap


Room c2S13, Building C3, Katsura Campus
TEL: +81-75-383-3690
E-mail: tutti@me


hirotaniAssociate Professor (Graduate School of Engineering)

Research Interests

1. Nano and microscale thermal measurement
2. Thermal device using nanostructures and nanocarbon materials
3. Investigating active thermal transport control


Room c2S14, Building C3, Katsura Campus
TEL: +81-75-383-3691
E-mail: hirotani.jun.7v@


BANERJEEJunior Associate Professor (Graduate School of Engineering)

Research Interests

1.    Fabrication and application of MEMS / NEMS devices
2.    NEMS resonator based mass-sensors
3.    Investigating mechanical behaviour of nano-materials


Room c2S15, Building C3, Katsura Campus
TEL: +81-75-383-3693
E-mail: banerjee.amit.3v@

Research Topics

Process and Characterization Technology for Micro/Nano Materials

We are working on microfabrication technology and integration technology mainly on silicon. We have developed processing technologies to fabricate complex three-dimensional structures from nanoscale to microscale, and have realized a wide range of micro and nano systems. We are also evaluating the mechanical reliability of the micro/nano materials that make up these fine structures. Small and highly portable elements are often in harsh environments such as vibration and shock, and evaluation of material properties and control are essential to achieve high reliability.

Figure 1 Micro/nano structures manufactured by microfabrication technology

Micro-Sensors and Actuators

We are conducting research and development of sensor devices such as inertial sensors and actuator devices such as optical components mainly on capacitance type transducers. Inertial sensors (accelerometers and vibratory gyroscopes) that measure the motion of objects are used in a wide range of applications, from game consoles and smartphones to automobiles and aircraft. We are developing a highly reliable and high-performance inertial sensor based on our knowledge of processing technology and material properties.


Figure 2 MEMS sensors and actuators

Nano and microscale thermal measurement and thermal devices

We have developed devices that measure heat and control heat flow using nanomaterials and nanostructures. While utilizing nanocarbon materials with excellent thermal conductivity, we fabricate various nanostructures using microfabrication techniques and evaluate their thermal and electrical properties. Although there are difficulties in measuring thermophysical properties such as the thermal conductivity of the nanomaterials themselves and nanostructures themselves, we are working to elucidate and control heat transport phenomena on the nano- and micro-scale while utilizing thermoreflectance and Raman spectroscopic techniques.aterials.


Figure 3 Schematic of a thermal measurement using thermoreflectance technique

MEMS / NEMS resonator devices

Resonators are a type of Micro / Nano electromechanical systems (MEMS / NEMS), where resonance vibration in a tiny mechanical element (like, a beam / membrane) is induced and sensed by electrical means. Such devices are micro / nano-scale functional analogues of common harmonic oscillators, such as a simple pendulum, except for their incredibly small size. Naturally, experimental realization of such devices is challenging; however, using state-of-the-art micro / nano-fabrication tools, we are developing various types of MEMS / NEMS resonator devices using Si, and atomically thin materials.


Figure 4 Nanomechanical resonator using ultra-thin silicon thin film